Inventor · disambiguated record
Yali Fu
Also filed as: FU YALI
2 granted patents·0 citations·filing 2016–2018
28Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0151US10170285B2Method of operating semiconductor manufacturing apparatus and semiconductor devicesBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Jan 1, 2019·0 cites·18 claims
- 0250US9899194B2Apparatus for plasma treatment and method of operating the apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted Feb 20, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →