Inventor · disambiguated record
Xueyu Liang
Also filed as: LIANG XUEYU
12 granted patents·1 pending application·1 citations·filing 2021–2022
79Inventor score
Files withCHANGXIN MEMORY TECH INC13
Top patents by PatentIndex Score
13 records- 0181US11822261B2Wafer edge exposure apparatus, wafer edge exposure method and photolithography deviceCHANGXIN MEMORY TECH INC·Filed 2021·Granted Nov 21, 2023·1 cites·19 claims
- 0261US12117738B2Reticle detection apparatus, reticle detection method, exposure machine and photolithography deviceCHANGXIN MEMORY TECH INC·Filed 2021·Granted Oct 15, 2024·0 cites·20 claims
- 0358US12070780B2Machine cleaning deviceCHANGXIN MEMORY TECH INC·Filed 2021·Granted Aug 27, 2024·0 cites·17 claims
- 0455US11922262B2Photomask inspection system and methodCHANGXIN MEMORY TECH INC·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
- 0554US12264749B2Flow control equipment and automatic refilling systemCHANGXIN MEMORY TECH INC·Filed 2022·Granted Apr 1, 2025·0 cites·12 claims
- 0654US11923226B2Conveyor device and semiconductor production equipmentCHANGXIN MEMORY TECH INC·Filed 2021·Granted Mar 5, 2024·0 cites·15 claims
- 0753US12203312B2System, method, and device for monitoring closed state of cover of exposure machine, medium, and equipmentCHANGXIN MEMORY TECH INC·Filed 2022·Granted Jan 21, 2025·0 cites·20 claims
- 0851US12191177B2Storage system, query system and storage method for reticles, and computer deviceCHANGXIN MEMORY TECH INC·Filed 2021·Granted Jan 7, 2025·0 cites·18 claims
- 0949US11972967B2Wafer processing system, semiconductor-machine automatic leveling apparatus and leveling method thereofCHANGXIN MEMORY TECH INC·Filed 2021·Granted Apr 30, 2024·0 cites·16 claims
- 1049US11669015B2Photolithography device and method for monitoring position of a light source in a photolithography deviceCHANGXIN MEMORY TECH INC·Filed 2021·Granted Jun 6, 2023·0 cites·18 claims
- 1147US12099309B2Wafer processing apparatus and wafer transfer methodCHANGXIN MEMORY TECH INC·Filed 2021·Granted Sep 24, 2024·0 cites·15 claims
- 1246US12072640B2Cleaning system, exposure machine, and cleaning methodCHANGXIN MEMORY TECH INC·Filed 2022·Granted Aug 27, 2024·0 cites·16 claims
- 1341US2022307656A1Valve control system and valve control methodCHANGXIN MEMORY TECH INC·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →