Inventor · disambiguated record

Wieslaw A. Lukaszek

Also filed as: LUKASZEK WIESLAW A

3 granted patents·149 citations·filing 1993–1997

77Inventor score

Technology areasH10P

Files withUNIV LELAND STANFORD JUNIOR1

Top patents by PatentIndex Score

3 records

0175US5594328APassive probe employing cluster of charge monitors for determining simultaneous charging characteristics of wafer environment inside IC process equipmentFiled 1995·Granted Jan 14, 1997·63 cites·24 claims
0270US5315145ACharge monitoring device for use in semiconductor wafer fabrication for unipolar operation and charge monitoringUNIV LELAND STANFORD JUNIOR·Filed 1993·Granted May 24, 1994·54 cites·10 claims
0361US5998282AMethod of reducing charging damage to integrated circuits in ion implant and plasma-based integrated circuit process equipmentFiled 1997·Granted Dec 7, 1999·32 cites·14 claims

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