Inventor · disambiguated record

Wen-Fang Tang

Also filed as: TANG WEN-FANG

1 granted patent·3 citations·filing 2001–2001

22Inventor score

Technology areasB08B

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0153US6530103B2Method and apparatus for eliminating wafer breakage during wafer transfer by a vacuum padTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Mar 11, 2003·3 cites·8 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →