Inventor · disambiguated record

Tsuneari Fukada

Also filed as: FUKADA TSUNEARI

2 granted patents·35 citations·filing 2002–2005

56Inventor score

Technology areasH10W

Files withCANON KK2

Top patents by PatentIndex Score

2 records

0176US6963389B2Alignment method, exposure apparatus and device fabrication methodCANON KK·Filed 2002·Granted Nov 8, 2005·35 cites·2 claims
0238US7187429B2Alignment method, exposure apparatus and device fabrication methodCANON KK·Filed 2005·Granted Mar 6, 2007·0 cites·5 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →