Inventor · disambiguated record
Thomas E. Wicker
Also filed as: WICKER THOMAS · WICKER THOMAS E
24 granted patents·2 pending applications·2,229 citations·filing 1986–2005
98Inventor score
Top patents by PatentIndex Score
26 records- 0199US6129808ALow contamination high density plasma etch chambers and methods for making the sameLAM RES CORP·Filed 1998·Granted Oct 10, 2000·215 cites·38 claims
- 0298US6583572B2Inductive plasma processor including current sensor for plasma excitation coilLAM RES CORP·Filed 2001·Granted Jun 24, 2003·458 cites·14 claims
- 0398US6394026B1Low contamination high density plasma etch chambers and methods for making the sameLAM RES CORP·Filed 2000·Granted May 28, 2002·107 cites·30 claims
- 0498US6164241AMultiple coil antenna for inductively-coupled plasma generation systemsLAM RES CORP·Filed 1998·Granted Dec 26, 2000·225 cites·54 claims
- 0597US6463875B1Multiple coil antenna for inductively-coupled plasma generation systemsLAM RES CORP·Filed 2000·Granted Oct 15, 2002·110 cites·20 claims
- 0697US5863376ATemperature controlling method and apparatus for a plasma processing chamberLAM RES CORP·Filed 1996·Granted Jan 26, 1999·281 cites·23 claims
- 0795US5993594AParticle controlling method and apparatus for a plasma processing chamberLAM RES CORP·Filed 1996·Granted Nov 30, 1999·94 cites·18 claims
- 0893US7096819B2Inductive plasma processor having coil with plural windings and method of controlling plasma densityLAM RES CORP·Filed 2001·Granted Aug 29, 2006·47 cites·26 claims
- 0993US6583064B2Low contamination high density plasma etch chambers and methods for making the sameLAM RES CORP·Filed 2002·Granted Jun 24, 2003·89 cites·13 claims
- 1093US6155199AParallel-antenna transformer-coupled plasma generation systemLAM RES CORP·Filed 1998·Granted Dec 5, 2000·91 cites·34 claims
- 1192US6464843B1Contamination controlling method and apparatus for a plasma processing chamberLAM RES CORP·Filed 1999·Granted Oct 15, 2002·75 cites·28 claims
- 1291US6227140B1Semiconductor processing equipment having radiant heated ceramic linerLAM RES CORP·Filed 1999·Granted May 8, 2001·119 cites·20 claims
- 1389US4724510AElectrostatic wafer clampTEGAL CORP·Filed 1986·Granted Feb 9, 1988·89 cites·5 claims
- 1484US6033585AMethod and apparatus for preventing lightup of gas distribution holesLAM RES CORP·Filed 1996·Granted Mar 7, 2000·47 cites·20 claims
- 1581US6881608B2Semiconductor processing equipment having improved process drift controlLAM RES CORP·Filed 2003·Granted Apr 19, 2005·12 cites·9 claims
- 1681US6673198B1Semiconductor processing equipment having improved process drift controlLAM RES CORP·Filed 1999·Granted Jan 6, 2004·28 cites·9 claims
- 1780US6251793B1Particle controlling method for a plasma processing chamberLAM RES CORP·Filed 1999·Granted Jun 26, 2001·29 cites·10 claims
- 1870US6028286AMethod for igniting a plasma inside a plasma processing reactorLAM RES CORP·Filed 1998·Granted Feb 22, 2000·22 cites·30 claims
- 1968US6527912B2Stacked RF excitation coil for inductive plasma processorLAM RES CORP·Filed 2001·Granted Mar 4, 2003·7 cites·31 claims
- 2063US6306244B1Apparatus for reducing polymer deposition on substrate supportLAM RES CORP·Filed 1999·Granted Oct 23, 2001·28 cites·29 claims
- 2160US6035868AMethod and apparatus for control of deposit build-up on an inner surface of a plasma processing chamberLAM RES CORP·Filed 1997·Granted Mar 14, 2000·21 cites·15 claims
- 2256US5518547AMethod and apparatus for reducing particulates in a plasma tool through steady state flowsIBM·Filed 1993·Granted May 21, 1996·15 cites·14 claims
- 2355US5543184AMethod of reducing particulates in a plasma tool through steady state flowsIBM·Filed 1995·Granted Aug 6, 1996·10 cites·9 claims
- 2454US2005145176A1Semiconductor processing equipment having improved process drift controlLAM RES CORP·Filed 2005·Application pending·0 cites
- 2546US6155203AApparatus for control of deposit build-up on an inner surface of a plasma processing chamberLAM RES CORP·Filed 1999·Granted Dec 5, 2000·10 cites·8 claims
- 2644US2004045506A1Inductive plasma processor methodLAM RES CORP·Filed 2003·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Thomas E. Wicker files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →