Inventor · disambiguated record
Takashi Tsuto
Also filed as: TSUTO TAKASHI
1 granted patent·1 pending application·0 citations·filing 2020–2022
10Inventor score
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0149US12009189B2Method for controlling cleaning and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jun 11, 2024·0 cites·16 claims
- 0227US2021013016A1Processing method, placing pedestal, plasma processing apparatus, and recording mediumTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →