Inventor · disambiguated record

Takeshi Ohtomo

Also filed as: OHTOMO TAKESHI

0 granted patents·1 pending application·0 citations·filing 2010–2010

Technology areasG03F

Files withNAT UNIVERSITY CORP YOKOHAMA NAT UNIVERSITY1

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1 record

0133US2011046795A1Drive control method, drive control apparatus, stage control method, stage control apparatus, exposure method, exposure apparatus and measuring apparatusNAT UNIVERSITY CORP YOKOHAMA NAT UNIVERSITY·Filed 2010·Application pending·0 cites

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