Inventor · disambiguated record
Tadaki Miyazaki
Also filed as: MIYAZAKI TADAKI
8 granted patents·17 citations·filing 2010–2018
79Inventor score
Top patents by PatentIndex Score
8 records- 0190US9703214B2Lithography apparatus, lithography method, and article manufacturing methodCANON KK·Filed 2014·Granted Jul 11, 2017·10 cites·10 claims
- 0278US10185876B2Detection apparatus, detection method, and lithography apparatusCANON KK·Filed 2015·Granted Jan 22, 2019·2 cites·10 claims
- 0371US11156929B2Detection apparatus detection method and lithography apparatusCANON KK·Filed 2018·Granted Oct 26, 2021·2 cites·8 claims
- 0470US10503079B2Position detection method, position detection apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2017·Granted Dec 10, 2019·1 cites·17 claims
- 0564US8405818B2Position detection apparatus, exposure apparatus, and device fabrication methodMIYAZAKI TADAKI·Filed 2010·Granted Mar 26, 2013·2 cites·6 claims
- 0644US9606461B2Measuring apparatus, measuring method, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted Mar 28, 2017·0 cites·18 claims
- 0742US10659736B2Alignment apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2018·Granted May 19, 2020·0 cites·13 claims
- 0840US10314142B2Apparatus and method for detecting position, exposure apparatus, and method for the sameCANON KK·Filed 2016·Granted Jun 4, 2019·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →