Inventor · disambiguated record
Takahiro Ema
Also filed as: EMA TAKAHIRO
3 granted patents·120 citations·filing 1998–1998
75Inventor score
Technology areasH01J
Files withNEC CORP3
Top patents by PatentIndex Score
3 records- 0188US6049085ACharged particle beam exposure method and method for making patterns on waferNEC CORP·Filed 1998·Granted Apr 11, 2000·89 cites·16 claims
- 0261US6034376AElectron-beam exposure system and a method applied thereinNEC CORP·Filed 1998·Granted Mar 7, 2000·18 cites·12 claims
- 0354US6037606AConstruction of and method of manufacturing an MIM or MIS electron sourceNEC CORP·Filed 1998·Granted Mar 14, 2000·13 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →