Inventor · disambiguated record
Soichi Kanno
Also filed as: KANNO SOICHI
4 granted patents·56 citations·filing 1997–2015
73Inventor score
Top patents by PatentIndex Score
4 records- 0175US10847350B2Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Nov 24, 2020·3 cites·11 claims
- 0267US5875416ATemperature adjusting method and apparatus therefor using at least two temperature sensors and a correction valueTOKYO ELECTRON LTD·Filed 1997·Granted Feb 23, 1999·43 cites·12 claims
- 0335US5777881AMethod of deciding control parameters of heat treatment instrument and apparatus thereofTOKYO ELECTRON LTD·Filed 1997·Granted Jul 7, 1998·10 cites·6 claims
- 0428US8636409B2Heat treatment apparatus and temperature measuring method thereofKANNO SOICHI·Filed 2012·Granted Jan 28, 2014·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →