Inventor · disambiguated record
Shih-Yuan Ma
Also filed as: MA SHIH-YUAN
4 granted patents·2 pending applications·5 citations·filing 2021–2025
62Inventor score
Files withNANYA TECHNOLOGY CORP6
Top patents by PatentIndex Score
6 records- 0190US11796924B2Method for overlay error correction and method for manufacturing a semiconductor device structure with overlay marksNANYA TECHNOLOGY CORP·Filed 2022·Granted Oct 24, 2023·4 cites·13 claims
- 0281US12242202B2Method for overlay error correctionNANYA TECHNOLOGY CORP·Filed 2022·Granted Mar 4, 2025·1 cites·19 claims
- 0369US2025362589A1Method of manufacturing semiconductor device structureNANYA TECHNOLOGY CORP·Filed 2025·Application pending·0 cites
- 0457US12416856B2Method of manufacturing semiconductor device structureNANYA TECHNOLOGY CORP·Filed 2021·Granted Sep 16, 2025·0 cites·16 claims
- 0554US12002765B2Marks for overlay measurement and overlay error correctionNANYA TECHNOLOGY CORP·Filed 2022·Granted Jun 4, 2024·0 cites·17 claims
- 0650US2023213872A1Mark for overlay measurementNANYA TECHNOLOGY CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →