Inventor · disambiguated record

Shyh-Kuen Lai

Also filed as: LAI SHYH-KUEN

1 granted patent·5 citations·filing 2006–2006

26Inventor score

Technology areasH10P

Files withUNITED MICROELECTRONICS CORP1

Top patents by PatentIndex Score

1 record

0160US7632377B2Dry etching apparatus capable of monitoring motion of WAP ring thereofUNITED MICROELECTRONICS CORP·Filed 2006·Granted Dec 15, 2009·5 cites·22 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →