Inventor · disambiguated record
Rumen Iliew
Also filed as: ILIEW RUMEN
4 granted patents·8 citations·filing 2014–2015
64Inventor score
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0179US10001631B2Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film elementZEISS CARL SMT GMBH·Filed 2014·Granted Jun 19, 2018·6 cites·40 claims
- 0266US9348234B2Microlithographic apparatusZEISS CARL SMT GMBH·Filed 2015·Granted May 24, 2016·1 cites·22 claims
- 0358US9470872B2Reflective optical elementZEISS CARL SMT GMBH·Filed 2014·Granted Oct 18, 2016·1 cites·21 claims
- 0454US9709770B2Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Jul 18, 2017·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →