Inventor · disambiguated record
Robert F. Edgerton
Also filed as: EDGERTON ROBERT F
3 granted patents·146 citations·filing 1981–1982
76Inventor score
Files withENERGY CONVERSION DEVICES INC3
Top patents by PatentIndex Score
3 records- 0192US4389970AApparatus for regulating substrate temperature in a continuous plasma deposition processENERGY CONVERSION DEVICES INC·Filed 1981·Granted Jun 28, 1983·72 cites·4 claims
- 0282US4470369AApparatus for uniformly heating a substrateENERGY CONVERSION DEVICES INC·Filed 1982·Granted Sep 11, 1984·48 cites·3 claims
- 0369US4525376AOptical methods for controlling layer thicknessENERGY CONVERSION DEVICES INC·Filed 1982·Granted Jun 25, 1985·26 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →