Inventor · disambiguated record

Reiko Nishimura

Also filed as: NISHIMURA REIKO

1 granted patent·4 citations·filing 2010–2010

24Inventor score

Technology areasH01J

Files withNISHIMURA REIKO1

Top patents by PatentIndex Score

1 record

0157US8247783B2Method of determining main deflection settling time for charged particle beam writing, method of writing with charged particle beam, and apparatus for writing with charged particle beamNISHIMURA REIKO·Filed 2010·Granted Aug 21, 2012·4 cites·8 claims

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