Inventor · disambiguated record

Przemyslaw W. Wachulak

Also filed as: WACHULAK PRZEMYSLAW W

1 granted patent·0 citations·filing 2007–2007

8Inventor score

Technology areasG03F

Files withUNIV COLORADO STATE RES FOUND1

Top patents by PatentIndex Score

1 record

0140US7705332B2Nanometer-scale lithography using extreme ultraviolet/soft x-ray laser interferometryUNIV COLORADO STATE RES FOUND·Filed 2007·Granted Apr 27, 2010·0 cites·19 claims

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