Inventor · disambiguated record
Peter L. Kellerman
Also filed as: KELLERMAN PETER · KELLERMAN PETER L · KELLERMAN PETER LAWRENCE
61 granted patents·13 pending applications·1,199 citations·filing 1991–2025
99Inventor score
Files withAXCELIS TECH INC18VARIAN SEMICONDUCTOR EQUIPMENT12VARIAN SEMICONDUCTOR EQUIPMENT ASS INC12KELLERMAN PETER L10EATON CORP8
Top patents by PatentIndex Score
74 records- 0196US7888653B2Techniques for independently controlling deflection, deceleration and focus of an ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Feb 15, 2011·33 cites·28 claims
- 0295US6305316B1Integrated power oscillator RF source of plasma immersion ion implantation systemAXCELIS TECH INC·Filed 2000·Granted Oct 23, 2001·67 cites·19 claims
- 0395US6237527B1System for improving energy purity and implant consistency, and for minimizing charge accumulation of an implanted substrateAXCELIS TECH INC·Filed 1999·Granted May 29, 2001·281 cites·6 claims
- 0494US6101971AIon implantation control using charge collection, optical emission spectroscopy and mass analysisAXCELIS TECH INC·Filed 1998·Granted Aug 15, 2000·142 cites·7 claims
- 0592US7855087B2Floating sheet production apparatus and methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Dec 21, 2010·13 cites·20 claims
- 0691US8129695B2System and method for controlling deflection of a charged particle beam within a graded electrostatic lensKELLERMAN PETER L·Filed 2009·Granted Mar 6, 2012·15 cites·19 claims
- 0791US6050218ADosimetry cup charge collection in plasma immersion ion implantationEATON CORP·Filed 1998·Granted Apr 18, 2000·114 cites·17 claims
- 0891US5780863AAccelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanterEATON CORP·Filed 1997·Granted Jul 14, 1998·69 cites·30 claims
- 0989US8519353B2Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beamRADOVANOV SVETLANA·Filed 2010·Granted Aug 27, 2013·11 cites·17 claims
- 1087US7816153B2Method and apparatus for producing a dislocation-free crystalline sheetVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Oct 19, 2010·8 cites·9 claims
- 1186US7675047B2Technique for shaping a ribbon-shaped ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Mar 9, 2010·9 cites·20 claims
- 1285US7019314B1Systems and methods for ion beam focusingAXCELIS TECH INC·Filed 2004·Granted Mar 28, 2006·20 cites·29 claims
- 1384US9957636B2System and method for crystalline sheet growth using a cold block and gas jetVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted May 1, 2018·2 cites·20 claims
- 1484US8685162B2Removing a sheet from the surface of a melt using gas jetsKELLERMAN PETER L·Filed 2011·Granted Apr 1, 2014·2 cites·24 claims
- 1584US6946403B2Method of making a MEMS electrostatic chuckAXCELIS TECH INC·Filed 2003·Granted Sep 20, 2005·32 cites·49 claims
- 1683US10030317B2Apparatus and method for controlling thickness of a crystalline sheet grown on a meltVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Jul 24, 2018·2 cites·17 claims
- 1782US9805931B2Liquid immersion dopingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Oct 31, 2017·3 cites·16 claims
- 1882US9112064B2Floating sheet production apparatus and methodKELLERMAN PETER L·Filed 2010·Granted Aug 18, 2015·2 cites·22 claims
- 1982US8475591B2Method of controlling a thickness of a sheet formed from a meltKELLERMAN PETER L·Filed 2009·Granted Jul 2, 2013·9 cites·14 claims
- 2081US10801125B2Method for controlling heat flow within a silicon melt using a heat diffusion barrier assemblyLEADING EDGE CRYSTAL TECH INC·Filed 2019·Granted Oct 13, 2020·1 cites·20 claims
- 2180US10468224B2Apparatus and method for controlling ion beam properties using energy filterVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Nov 5, 2019·2 cites·16 claims
- 2280US10415151B1Apparatus for controlling heat flow within a silicon meltVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Sep 17, 2019·1 cites·8 claims
- 2380US5856674AFilament for ion implanter plasma showerEATON CORP·Filed 1997·Granted Jan 5, 1999·32 cites·10 claims
- 2477US9587324B2Apparatus for processing a meltVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Mar 7, 2017·1 cites·19 claims
- 2577US7078707B1Ion beam scanning control methods and systems for ion implantation uniformityAXCELIS TECH INC·Filed 2005·Granted Jul 18, 2006·5 cites·20 claims
- 2677US7072166B2Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltageAXCELIS TECH INC·Filed 2003·Granted Jul 4, 2006·19 cites·27 claims
- 2777US6458430B1Pretreatment process for plasma immersion ion implantationAXCELIS TECH INC·Filed 1999·Granted Oct 1, 2002·64 cites·20 claims
- 2877US2025389050A1Wafer with regions of low oxygen concentrationBLUE ORIGIN MFG LLC·Filed 2025·Application pending·0 cites
- 2976US8764901B2Removing a sheet from the surface of a melt using elasticity and buoyancyKELLERMAN PETER L·Filed 2011·Granted Jul 1, 2014·1 cites·20 claims
- 3075US7267520B2Wafer scanning system with reciprocating rotary motion utilizing springs and counterweightsAXCELIS TECH INC·Filed 2005·Granted Sep 11, 2007·5 cites·22 claims
- 3174US7033443B2Gas-cooled clamp for RTPAXCELIS TECH INC·Filed 2003·Granted Apr 25, 2006·17 cites·22 claims
- 3272US8226903B2Removal of a sheet from a production apparatusKELLERMAN PETER L·Filed 2011·Granted Jul 24, 2012·2 cites·11 claims
- 3372US2020115819A1Apparatus for forming crystalline sheet from a meltVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Application pending·0 cites
- 3471US9567691B2Melt purification and delivery systemKELLERMAN PETER L·Filed 2009·Granted Feb 14, 2017·1 cites·13 claims
- 3571US7723706B2Horizontal and vertical beam angle measurement techniqueVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted May 25, 2010·3 cites·18 claims
- 3671US7421973B2System and method for performing SIMOX implants using an ion showerAXCELIS TECH INC·Filed 2004·Granted Sep 9, 2008·12 cites·17 claims
- 3770US9677193B2Sheet production apparatus for removing a crystalline sheet from the surface of a melt using gas jets located above and below the crystalline sheetVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Jun 13, 2017·0 cites·5 claims
- 3869US12460313B2Active edge control of a crystalline sheet formed on the surface of a meltBLUE ORIGIN MFG LLC·Filed 2021·Granted Nov 4, 2025·0 cites·13 claims
- 3969US7800082B2Electromagnet with active field containmentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Sep 21, 2010·5 cites·25 claims
- 4069US6347919B1Wafer processing chamber having separable upper and lower halvesEATON CORP·Filed 1999·Granted Feb 19, 2002·35 cites·59 claims
- 4169US2015040818A1Method for achieving sustained anisotropic crystal growth on the surface of a meltVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Application pending·0 cites
- 4268US7072165B2MEMS based multi-polar electrostatic chuckAXCELIS TECH INC·Filed 2003·Granted Jul 4, 2006·11 cites·47 claims
- 4368US6947274B2Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltageAXCELIS TECH INC·Filed 2003·Granted Sep 20, 2005·11 cites·20 claims
- 4467US7394079B2Architecture for ribbon ion beam ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jul 1, 2008·2 cites·15 claims
- 4567US6905984B2MEMS based contact conductivity electrostatic chuckAXCELIS TECH INC·Filed 2003·Granted Jun 14, 2005·11 cites·26 claims
- 4666US5198676AIon beam profiling method and apparatusEATON CORP·Filed 1991·Granted Mar 30, 1993·42 cites·15 claims
- 4765US12359343B2Wafer with regions of low oxygen concentrationBLUE ORIGIN MFG LLC·Filed 2020·Granted Jul 15, 2025·0 cites·18 claims
- 4865US7598495B2Methods and systems for trapping ion beam particles and focusing an ion beamAXCELIS TECH INC·Filed 2007·Granted Oct 6, 2009·2 cites·33 claims
- 4964US10662548B2Method for achieving sustained anisotropic crystal growth on the surface of a silicon meltLEADING EDGE CRYSTAL TECH INC·Filed 2018·Granted May 26, 2020·0 cites·9 claims
- 5064US7748344B2Segmented resonant antenna for radio frequency inductively coupled plasmasAXCELIS TECH INC·Filed 2003·Granted Jul 6, 2010·4 cites·12 claims
Showing the top 50 of 74 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →