Inventor · disambiguated record
Naoko Tsugama
Also filed as: TSUGAMA NAOKO
2 granted patents·12 citations·filing 2015–2019
57Inventor score
Technology areasH10P
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0190US10241418B2Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatusASML NETHERLANDS BV·Filed 2015·Granted Mar 26, 2019·9 cites·20 claims
- 0282US10613445B2Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing processASML NETHERLANDS BV·Filed 2019·Granted Apr 7, 2020·3 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →