Inventor · disambiguated record
Nagura Shigehiro
Also filed as: SHIGEHIRO NAGURA
3 granted patents·87 citations·filing 1998–2002
74Inventor score
Files withSHINETSU CHEMICAL CO3
Top patents by PatentIndex Score
3 records- 0172US6136502AResist composition and patterning processSHINETSU CHEMICAL CO·Filed 1998·Granted Oct 24, 2000·64 cites·19 claims
- 0264US6613844B2Styrene polymer, chemically amplified positive resist composition and patterning processSHINETSU CHEMICAL CO·Filed 2002·Granted Sep 2, 2003·8 cites·10 claims
- 0357US6384169B1Styrene polymer, chemically amplified positive resist composition and patterning processSHINETSU CHEMICAL CO·Filed 1998·Granted May 7, 2002·15 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →