Inventor · disambiguated record
Naka Onoda
Also filed as: ONODA NAKA
5 granted patents·1 pending application·46 citations·filing 1997–2009
76Inventor score
Top patents by PatentIndex Score
6 records- 0177US6040583AElectron beam exposure method using a moving stageNEC CORP·Filed 1998·Granted Mar 21, 2000·37 cites·6 claims
- 0247US2010103392A1Immersion exposure device cleaning method, dummy wafer, and immersion exposure deviceNEC ELECTRONICS CORP·Filed 2009·Application pending·0 cites
- 0332US6103434AElectron beam direct drawing method, system and recording mediumNEC CORP·Filed 1998·Granted Aug 15, 2000·3 cites·2 claims
- 0432US5908733AMethod of electron beam exposure for superimposing second pattern over existing patternNEC CORP·Filed 1997·Granted Jun 1, 1999·5 cites·4 claims
- 0528US6198109B1Aperture apparatus used for photolithography and method of fabricating the sameNEC CORP·Filed 1998·Granted Mar 6, 2001·1 cites·6 claims
- 0625US5949079AMethod of and an apparatus for electron beam exposureNEC CORP·Filed 1999·Granted Sep 7, 1999·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →