Inventor · disambiguated record

Nathan Kameling

Also filed as: KAMELING NATHAN

1 granted patent·1 citations·filing 2006–2006

15Inventor score

Technology areasH10P

Files withASM JAPAN1

Top patents by PatentIndex Score

1 record

0157US7718544B2Method of forming silicon-containing insulation film having low dielectric constant and low diffusion coefficientASM JAPAN·Filed 2006·Granted May 18, 2010·1 cites·20 claims

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