Inventor · disambiguated record
Mitsuyoshi Uto
Also filed as: UTO MITSUYOSHI
3 granted patents·109 citations·filing 1999–2001
74Inventor score
Top patents by PatentIndex Score
3 records- 0182US6277008B1Polishing apparatusNEC CORP·Filed 1999·Granted Aug 21, 2001·83 cites·2 claims
- 0264US6547961B2Grinding slurry recycling apparatusNEC ELECTRONICS CORP·Filed 2001·Granted Apr 15, 2003·14 cites·2 claims
- 0341US6102788ASemiconductor wafer carrier stage for chemical mechanical polishing apparatusNEC CORP·Filed 1999·Granted Aug 15, 2000·12 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →