Inventor · disambiguated record
Masaharu Yachi
Also filed as: YACHI MASAHARU
3 granted patents·53 citations·filing 1991–1993
71Inventor score
Files withSEIKO EPSON CORP3
Top patents by PatentIndex Score
3 records- 0158US5578163AMethod of making an aluminum containing interconnect without hardening of a sidewall protection layerSEIKO EPSON CORP·Filed 1992·Granted Nov 26, 1996·36 cites·21 claims
- 0258US5232537ADry etching apparatusSEIKO EPSON CORP·Filed 1991·Granted Aug 3, 1993·14 cites·6 claims
- 0331US5346582ADry etching apparatusSEIKO EPSON CORP·Filed 1993·Granted Sep 13, 1994·3 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →