Inventor · disambiguated record
Masaki Tai
Also filed as: TAI MASAKI
2 granted patents·1 pending application·0 citations·filing 2009–2025
22Inventor score
Top patents by PatentIndex Score
3 records- 0142US2025246405A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0230US11194257B2Exposure method, exposure apparatus, method of manufacturing article, and measurement methodCANON KK·Filed 2019·Granted Dec 7, 2021·0 cites·10 claims
- 0328US8237917B2Exposure apparatus and device manufacturing methodTAI MASAKI·Filed 2009·Granted Aug 7, 2012·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →