Inventor · disambiguated record

Matthias Stepper

Also filed as: STEPPER MATTHIAS

1 granted patent·0 citations·filing 2021–2021

4Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0139US11754934B2Projection exposure apparatus for semiconductor lithography having an optical element with sensor reference and method for aligning the sensor referenceZEISS CARL SMT GMBH·Filed 2021·Granted Sep 12, 2023·0 cites·20 claims

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