Inventor · disambiguated record
Lim Chow Tian
Also filed as: TIAN LIM CHOW
2 granted patents·1 pending application·0 citations·filing 2021–2024
22Inventor score
Files withKLA CORP3
Top patents by PatentIndex Score
3 records- 0152US2025269496A1Light weight high stiffness chuck with interchangeable topKLA CORP·Filed 2024·Application pending·0 cites
- 0248US12405225B2Lifter assembly with bellows for optical inspection systemKLA CORP·Filed 2023·Granted Sep 2, 2025·0 cites·16 claims
- 0342US11794314B2Quick swap chuck with vacuum holding interchangeable top plateKLA CORP·Filed 2021·Granted Oct 24, 2023·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →