Inventor · disambiguated record
Kentarou Kawanami
Also filed as: KAWANAMI KENTAROU
4 granted patents·9 citations·filing 2008–2013
64Inventor score
Top patents by PatentIndex Score
4 records- 0177US7672067B2Optical device, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Granted Mar 2, 2010·8 cites·6 claims
- 0257US8502961B2Exposure method, exposure apparatus, and method of manufacturing deviceKAWANAMI KENTAROU·Filed 2010·Granted Aug 6, 2013·1 cites·7 claims
- 0349US9329489B2Exposure method, exposure apparatus, and method of manufacturing deviceCANON KK·Filed 2013·Granted May 3, 2016·0 cites·10 claims
- 0431US8749758B2Exposure apparatus and method of manufacturing deviceKAWANAMI KENTAROU·Filed 2012·Granted Jun 10, 2014·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →