Inventor · disambiguated record
Kentaro Goshima
Also filed as: GOSHIMA KENTARO
1 granted patent·4 pending applications·0 citations·filing 2022–2024
13Inventor score
Technology areasH10P
Files withKOKUSAI ELECTRIC CORP5
Top patents by PatentIndex Score
5 records- 0166US12435424B2Raw material supply system, substrate processing apparatus, and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2023·Granted Oct 7, 2025·0 cites·18 claims
- 0257US2025011930A1Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording MediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0348US2023279550A1Fluid supply system, processing apparatus, recording medium, and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0446US2023094500A1Gas supply system, substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 0543US2024421007A1Material monitoring system, processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →