Inventor · disambiguated record
Kazuya Kijima
Also filed as: KIJIMA KAZUYA
2 granted patents·1 pending application·2 citations·filing 2021–2024
39Inventor score
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0182US11835470B2Detection apparatus, detection method, exposure apparatus, exposure system, and article manufacturing methodCANON KK·Filed 2021·Granted Dec 5, 2023·2 cites·11 claims
- 0266US12241846B2Detection apparatus, detection method, exposure apparatus, exposure system, and article manufacturing methodCANON KK·Filed 2023·Granted Mar 4, 2025·0 cites·9 claims
- 0352US2024393702A1Substrate processing apparatus, substrate processing method and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →