Inventor · disambiguated record
Kanzo Kato
Also filed as: KATO KANZO
2 granted patents·0 citations·filing 2016–2019
27Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0144US11430704B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2019·Granted Aug 30, 2022·0 cites·6 claims
- 0236US10395998B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Aug 27, 2019·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →