Inventor · disambiguated record
Hyungsik Ko
Also filed as: KO HYUNGSIK
2 granted patents·5 pending applications·0 citations·filing 2023–2024
23Inventor score
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0154US12009187B2Plasma shutter and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Jun 11, 2024·0 cites·20 claims
- 0251US12400839B2Focus ring and apparatus for processing a substrate including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Aug 26, 2025·0 cites·20 claims
- 0345US2024331981A1Showerhead, substrate processing apparatus including the same, and semiconductor fabrication method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0444US2025087465A1Ring assembly for semiconductor process, substrate processing apparatus including the same, and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0543US2024105426A1Showerhead and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0642US2024096637A1Substrate processing apparatus and substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0741US2024021417A1Focus ring, substrate processing apparatus including the same, and semiconductor fabrication method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →