Inventor · disambiguated record
Heinrich Friedhelm
Also filed as: FRIEDHELM HEINRICH
2 granted patents·30 citations·filing 1990–1994
63Inventor score
Technology areasH01J
Files withFRAUNHOFER GES FORSCHUNG2
Top patents by PatentIndex Score
2 records- 0160US5319197AProcess for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the sameFRAUNHOFER GES FORSCHUNG·Filed 1990·Granted Jun 7, 1994·16 cites·12 claims
- 0257US5406080AProcess for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the sameFRAUNHOFER GES FORSCHUNG·Filed 1994·Granted Apr 11, 1995·14 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →