Inventor · disambiguated record

Gregory O. Vaschenko

Also filed as: VASCHENKO GREGORY O

1 granted patent·0 citations·filing 2015–2015

13Inventor score

Technology areasH10P

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0143US9669334B2Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply materialASML NETHERLANDS BV·Filed 2015·Granted Jun 6, 2017·0 cites·27 claims

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