Inventor · disambiguated record
Feng-Chih Hsu
Also filed as: HSU FENG-CHIH
2 granted patents·14 citations·filing 2002–2013
57Inventor score
Top patents by PatentIndex Score
2 records- 0181US9687956B2Polishing pad with offset concentric grooving pattern and method for polishing a substrate therewithCABOT MICROELECTRONICS CORP·Filed 2013·Granted Jun 27, 2017·9 cites·19 claims
- 0249US6561880B1Apparatus and method for cleaning the polishing pad of a linear polisherTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 13, 2003·5 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →