Inventor · disambiguated record
Erwin Steinkirchner
Also filed as: STEINKIRCHNER ERWIN
5 granted patents·67 citations·filing 2003–2013
80Inventor score
Files withINFINEON TECHNOLOGIES AG5
Top patents by PatentIndex Score
5 records- 0188US8674524B1Alignment marks and a semiconductor workpieceINFINEON TECHNOLOGIES AG·Filed 2012·Granted Mar 18, 2014·14 cites·29 claims
- 0278US10199330B2Alignment mark arrangement, semiconductor workpiece, and method for aligning a waferINFINEON TECHNOLOGIES AG·Filed 2013·Granted Feb 5, 2019·5 cites·11 claims
- 0378US7016750B2Method, device, computer-readable storage medium and computer program element for monitoring of a manufacturing processINFINEON TECHNOLOGIES AG·Filed 2003·Granted Mar 21, 2006·27 cites·12 claims
- 0472US7820358B2Photo-resist material structure and method of producing the sameINFINEON TECHNOLOGIES AG·Filed 2007·Granted Oct 26, 2010·4 cites·51 claims
- 0570US7027943B2Method, device, computer-readable storage medium and computer program element for the computer-aided monitoring of a process parameter of a manufacturing process of a physical objectINFINEON TECHNOLOGIES AG·Filed 2003·Granted Apr 11, 2006·17 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →