Inventor · disambiguated record
Eryn Smith
Also filed as: SMITH ERYN
13 granted patents·2 pending applications·76 citations·filing 2000–2024
89Inventor score
Top patents by PatentIndex Score
15 records- 0188US6322935B1Method and apparatus for repairing an alternating phase shift maskMETRON TECHNOLOGY·Filed 2000·Granted Nov 27, 2001·35 cites·21 claims
- 0283US6593040B2Method and apparatus for repairing a photomaskMETRON TECHNOLOGY·Filed 2001·Granted Jul 15, 2003·21 cites·21 claims
- 0378US9984913B2Tri-modal carrier for a semiconductive waferSMITH ERYN·Filed 2017·Granted May 29, 2018·2 cites·6 claims
- 0472US9754809B2Tri-modal carrier for a semiconductive waferSMITH ERYN·Filed 2014·Granted Sep 5, 2017·2 cites·10 claims
- 0572US9246415B2Electrostatic carrier traySMITH ERYN·Filed 2013·Granted Jan 26, 2016·3 cites·9 claims
- 0665US10236202B2System and method for adhering a semiconductive wafer to a mobile electrostatic carrier through a vacuumSMITH ERYN·Filed 2016·Granted Mar 19, 2019·1 cites·16 claims
- 0763US9966294B2Mobile electrostatic carrier for a semiconductive wafer and a method of using thereof for singulation of the semiconductive waferSMITH ERYN·Filed 2015·Granted May 8, 2018·1 cites·6 claims
- 0860US2024269867A1Electrostatically-Enhanced Friction-Gripping End EffectorDIABLO CAPITAL INC·Filed 2024·Application pending·0 cites
- 0954USD926716SAntenna pattern for a semiconductive substrate carrierSMITH ERYN·Filed 2020·Granted Aug 3, 2021·2 cites·1 claims
- 1053US11772136B2System and method for particle abatement in a wafer processing toolSMITH ERYN·Filed 2021·Granted Oct 3, 2023·0 cites·7 claims
- 1152USD689835SElectrostatic carrier traySMITH ERYN·Filed 2013·Granted Sep 17, 2013·8 cites·1 claims
- 1246US11335581B2System and method for adhering a semiconductive wafer to an electrostatic carrier by adjusting relative permittivitySMITH ERYN·Filed 2020·Granted May 17, 2022·0 cites·11 claims
- 1344US10607875B2Automated electrostatic bonding/de-bonding apparatusSMITH ERYN·Filed 2018·Granted Mar 31, 2020·0 cites·20 claims
- 1440US2003207184A1Method and apparatus for repairing an alternating phase shift maskFiled 2003·Application pending·0 cites
- 1533USD913256SAntenna pattern for a semiconductive substrate carrierSMITH ERYN·Filed 2019·Granted Mar 16, 2021·1 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →