Inventor · disambiguated record

Detlef Hogenkamp

Also filed as: HOGENKAMP DETLEF

1 granted patent·1 pending application·11 citations·filing 1997–2006

34Inventor score

Technology areasB23Q G01N

Files withMIKROSKOPIE UND SYSTEME GMBH1 VISTEC SEMICONDUCTOR SYS GMBH1

Top patents by PatentIndex Score

2 records

0134US6042079ADevice for vibration isolationMIKROSKOPIE UND SYSTEME GMBH·Filed 1997·Granted Mar 28, 2000·11 cites·13 claims
0232US2007037303A1Apparatus and method of illuminating the surface of a wafer in a wafer inspection systemVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites

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