Inventor · disambiguated record
Chikara Tokida
Also filed as: TOKIDA CHIKARA
2 granted patents·12 citations·filing 2007–2010
57Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0180US7737426B2Substrate positioning device and substrate positioning method for a substrate having a transparent layer and a nontransparent layerTOKYO ELECTRON LTD·Filed 2007·Granted Jun 15, 2010·8 cites·10 claims
- 0275US7973300B2Substrate positioning device and substrate positioning methodTOKYO ELECTRON LTD·Filed 2010·Granted Jul 5, 2011·4 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →