Inventor · disambiguated record
Chang-Boo Park
Also filed as: PARK CHANG SOO
1 granted patent·1 pending application·74 citations·filing 2002–2002
51Inventor score
Files withJUSUNG ENG CO LTD2
Top patents by PatentIndex Score
2 records- 0195US6723595B2Thin film deposition method including using atomic layer deposition without purging between introducing the gaseous reactantsJUSUNG ENG CO LTD·Filed 2002·Granted Apr 20, 2004·74 cites·19 claims
- 0236US2002132472A1Method for forming metal plugJUSUNG ENG CO LTD·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →