Inventor · disambiguated record
Chang Kil Nam
Also filed as: NAM CHANG KIL
2 granted patents·1 pending application·0 citations·filing 2008–2010
22Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0133US2010103584A1Electrostatic chucking apparatus and method for manufacturing the sameJUSUNG ENG CO LTD·Filed 2009·Application pending·0 cites
- 0227US8388757B2Electrostatic chuck and apparatus for treating substrate including the sameNAM CHANG KIL·Filed 2008·Granted Mar 5, 2013·0 cites·16 claims
- 0317US8445988B2Apparatus and method for plasma processingNAM CHANG KIL·Filed 2010·Granted May 21, 2013·0 cites·9 claims
Join the waitlist — get patent alerts
Get an alert when Chang Kil Nam files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →