Inventor · disambiguated record
Chris Jerbic
Also filed as: JERBIC CHRIS
4 granted patents·1,067 citations·filing 1992–1994
84Inventor score
Files withLSI LOGIC CORP4
Top patents by PatentIndex Score
4 records- 0196US5326427AMethod of selectively etching titanium-containing materials on a semiconductor wafer using remote plasma generationLSI LOGIC CORP·Filed 1992·Granted Jul 5, 1994·793 cites·11 claims
- 0295US5245790AUltrasonic energy enhanced chemi-mechanical polishing of silicon wafersLSI LOGIC CORP·Filed 1992·Granted Sep 21, 1993·210 cites·5 claims
- 0383US5500076AProcess for dynamic control of the concentration of one or more etchants in a plasma-enhanced etch process for formation of patterned layers of conductive material on integrated circuit structuresLSI LOGIC CORP·Filed 1994·Granted Mar 19, 1996·44 cites·10 claims
- 0469US5348614AProcess for dynamic control of the concentration of one or more reactants in a plasma-enhanced process for formation of integrated circuit structuresLSI LOGIC CORP·Filed 1993·Granted Sep 20, 1994·20 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →