Inventor · disambiguated record

Christian Hembd-Söllner

Also filed as: HEMBD-SOELLNER CHRISTIAN

1 granted patent·43 citations·filing 2002–2002

47Inventor score

Technology areasG03F

Files withZEISS CARL SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0188US6784977B2Projection exposure system as well as a process for compensating image defects occuring in the projection optics of a projection exposure system, in particular for microlithographyZEISS CARL SEMICONDUCTOR MFG·Filed 2002·Granted Aug 31, 2004·43 cites·12 claims

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