Inventor · disambiguated record
Bodo Kalkofen
Also filed as: KALKOFEN BODO
2 granted patents·0 citations·filing 2018–2019
27Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0152US10770297B2Method to form ultrashallow junctions using atomic layer deposition and annealingLAM RES CORP·Filed 2019·Granted Sep 8, 2020·0 cites·23 claims
- 0247US10522354B2Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealingLAM RES CORP·Filed 2018·Granted Dec 31, 2019·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →