Inventor · disambiguated record
Soichi Shida
Also filed as: SHIDA SOICHI
6 granted patents·143 citations·filing 1995–2012
85Inventor score
Top patents by PatentIndex Score
6 records- 0187US5757198AMethod and apparatus for detecting an IC defect using charged particle beamADVANTEST CORP·Filed 1996·Granted May 26, 1998·63 cites·9 claims
- 0271US5592100AMethod for detecting an IC defect using charged particle beamADVANTEST CORP·Filed 1996·Granted Jan 7, 1997·28 cites·1 claims
- 0369US7791022B2Scanning electron microscope with length measurement function and dimension length measurement methodADVANTEST CORP·Filed 2007·Granted Sep 7, 2010·3 cites·6 claims
- 0464US5521517AMethod and apparatus for detecting an IC defect using a charged particle beamADVANTEST CORP·Filed 1995·Granted May 28, 1996·27 cites·10 claims
- 0563US8809778B2Pattern inspection apparatus and methodOGINO RYUICHI·Filed 2012·Granted Aug 19, 2014·3 cites·11 claims
- 0660US5821761AApparatus detecting an IC defect by comparing electron emissions from two integrated circuitsADVANTEST CORP·Filed 1997·Granted Oct 13, 1998·19 cites·2 claims
Join the waitlist — get patent alerts
Get an alert when Soichi Shida files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →