Inventor · disambiguated record
Oliver Ache
Also filed as: ACHE OLIVER
4 granted patents·10 citations·filing 2014–2020
68Inventor score
Top patents by PatentIndex Score
4 records- 0190US9704238B2Method for correcting position measurements for optical errors and method for determining mask writer errorsKLA TENCOR CORP·Filed 2015·Granted Jul 11, 2017·5 cites·25 claims
- 0280US9201312B2Method for correcting position measurements for optical errors and method for determining mask writer errorsKLA TENCOR CORP·Filed 2014·Granted Dec 1, 2015·3 cites·26 claims
- 0374US12100574B2Target and algorithm to measure overlay by modeling back scattering electrons on overlapping structuresKLA CORP·Filed 2020·Granted Sep 24, 2024·1 cites·9 claims
- 0468US10337852B1Method for measuring positions of structures on a substrate and computer program product for determining positions of structures on a substrateKLA TENCOR CORP·Filed 2018·Granted Jul 2, 2019·1 cites·16 claims
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