Inventor · disambiguated record
Laura Maria Fernandez Diaz
Also filed as: FERNANDEZ DIAZ LAURA MARIA
3 granted patents·0 citations·filing 2018–2020
45Inventor score
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0168US11269259B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Mar 8, 2022·0 cites·19 claims
- 0264US10871715B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 22, 2020·0 cites·20 claims
- 0346US11086238B2System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate supportASML NETHERLANDS BV·Filed 2018·Granted Aug 10, 2021·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →