Inventor · disambiguated record
Hsueh Chi Shen
Also filed as: SHEN HSUEH-CHI
5 granted patents·1 pending application·90 citations·filing 2004–2009
80Inventor score
Top patents by PatentIndex Score
6 records- 0188US6980873B2System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environmentTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Dec 27, 2005·69 cites·20 claims
- 0276US7534725B2Advanced process control for semiconductor processingTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted May 19, 2009·7 cites·16 claims
- 0358US7751908B2Method and system for thermal process controlTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Jul 6, 2010·8 cites·6 claims
- 0455US8417362B2Advanced process control for semiconductor processingSHEN HSUEH CHI·Filed 2009·Granted Apr 9, 2013·2 cites·20 claims
- 0553US7437404B2System and method for improving equipment communication in semiconductor manufacturing equipmentTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Oct 14, 2008·4 cites·18 claims
- 0640US2008140590A1Process control integration systems and methodsTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →