Inventor · disambiguated record
Maikel Robert Goosen
Also filed as: GOOSEN MAIKEL ROBERT
13 granted patents·5 pending applications·15 citations·filing 2016–2023
85Inventor score
Files withASML NETHERLANDS BV18
Top patents by PatentIndex Score
18 records- 0194US10527958B2Lithographic methodASML NETHERLANDS BV·Filed 2018·Granted Jan 7, 2020·7 cites·21 claims
- 0285US11029610B2Lithographic methodASML NETHERLANDS BV·Filed 2018·Granted Jun 8, 2021·2 cites·21 claims
- 0383US10416577B2Position measuring method of an alignment targetASML NETHERLANDS BV·Filed 2016·Granted Sep 17, 2019·3 cites·20 claims
- 0481US10474039B2Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Nov 12, 2019·2 cites·17 claims
- 0579US10962887B2Lithographic methodASML NETHERLANDS BV·Filed 2019·Granted Mar 30, 2021·1 cites·20 claims
- 0662US12230469B2Apparatus for and method of local control of a charged particle beamASML NETHERLANDS BV·Filed 2021·Granted Feb 18, 2025·0 cites·20 claims
- 0759US12165836B2Systems and methods of profiling charged-particle beamsASML NETHERLANDS BV·Filed 2020·Granted Dec 10, 2024·0 cites·20 claims
- 0857US11881374B2Apparatus for and method of controlling an energy spread of a charged-particle beamASML NETHERLANDS BV·Filed 2020·Granted Jan 23, 2024·0 cites·15 claims
- 0954US11961700B2Systems and methods for image enhancement for a multi-beam charged-particle inspection systemASML NETHERLANDS BV·Filed 2020·Granted Apr 16, 2024·0 cites·15 claims
- 1054US11942302B2Pulsed charged-particle beam systemASML NETHERLANDS BV·Filed 2019·Granted Mar 26, 2024·0 cites·15 claims
- 1154US2025285227A1System and method for improving image quality during inspectionASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1253US2025336639A1Enhanced edge detection using detector incidence locationsASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1352US2024005463A1Sem image enhancementASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1451US12183540B2Systems and methods of determining aberrations in images obtained by a charged-particle beam toolASML NETHERLANDS BV·Filed 2022·Granted Dec 31, 2024·0 cites·17 claims
- 1548US2023048580A1Apparatus for and method of control of a charged particle beamASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1646US11791132B2Aperture array with integrated current measurementASML NETHERLANDS BV·Filed 2020·Granted Oct 17, 2023·0 cites·18 claims
- 1742US10942460B2Mark position determination methodASML NETHERLANDS BV·Filed 2017·Granted Mar 9, 2021·0 cites·21 claims
- 1841US2021249224A1Electron beam apparatus, inspection tool and inspection methodASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →