Inventor · disambiguated record
Hakki Ergün Cekli
Also filed as: CEKLI HAKKI ERGUN · CEKLI HAKKI ERGÜN
32 granted patents·47 citations·filing 2013–2023
95Inventor score
Files withASML NETHERLANDS BV32
Top patents by PatentIndex Score
32 records- 0195US11774862B2Method of obtaining measurements, apparatus for performing a process step, and metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Oct 3, 2023·4 cites·20 claims
- 0294US10527958B2Lithographic methodASML NETHERLANDS BV·Filed 2018·Granted Jan 7, 2020·7 cites·21 claims
- 0393US10474045B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Nov 12, 2019·6 cites·20 claims
- 0487US9879988B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2016·Granted Jan 30, 2018·4 cites·20 claims
- 0586US11392044B2Method of determining a position of a featureASML NETHERLANDS BV·Filed 2020·Granted Jul 19, 2022·2 cites·26 claims
- 0685US11029610B2Lithographic methodASML NETHERLANDS BV·Filed 2018·Granted Jun 8, 2021·2 cites·21 claims
- 0782US11803127B2Method for determining root cause affecting yield in a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2019·Granted Oct 31, 2023·3 cites·20 claims
- 0882US10578980B2Method of determining a position of a featureASML NETHERLANDS BV·Filed 2017·Granted Mar 3, 2020·2 cites·20 claims
- 0981US11782349B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2023·Granted Oct 10, 2023·0 cites·20 claims
- 1081US11300886B2Method of adapting feed-forward parametersASML NETHERLANDS BV·Filed 2018·Granted Apr 12, 2022·2 cites·22 claims
- 1181US10025193B2Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productASML NETHERLANDS BV·Filed 2014·Granted Jul 17, 2018·3 cites·20 claims
- 1280US10394139B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 27, 2019·2 cites·21 claims
- 1379US10962887B2Lithographic methodASML NETHERLANDS BV·Filed 2019·Granted Mar 30, 2021·1 cites·20 claims
- 1477US11592753B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Feb 28, 2023·0 cites·20 claims
- 1577US11175591B2Method of obtaining measurements, apparatus for performing a process step, and metrology apparatusASML NETHERLANDS BV·Filed 2017·Granted Nov 16, 2021·2 cites·24 claims
- 1677US10877381B2Methods of determining corrections for a patterning processASML NETHERLANDS BV·Filed 2017·Granted Dec 29, 2020·1 cites·20 claims
- 1774US11493851B2Lithographic method and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Nov 8, 2022·0 cites·20 claims
- 1874US11086229B2Method to predict yield of a device manufacturing processASML NETHERLANDS BV·Filed 2018·Granted Aug 10, 2021·1 cites·24 claims
- 1974US10495986B2Patterning device cooling system and method of thermally conditioning a patterning deviceASML NETHERLANDS BV·Filed 2017·Granted Dec 3, 2019·1 cites·22 claims
- 2074US9753377B2Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·2 cites·14 claims
- 2173US11156923B2Lithographic method and lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 26, 2021·1 cites·20 claims
- 2272US11327407B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted May 10, 2022·0 cites·20 claims
- 2372US10545410B2Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productASML NETHERLANDS BV·Filed 2017·Granted Jan 28, 2020·1 cites·20 claims
- 2470US11714357B2Method to predict yield of a device manufacturing processASML NETHERLANDS BV·Filed 2021·Granted Aug 1, 2023·0 cites·20 claims
- 2569US12078935B2Device manufacturing methodsASML NETHERLANDS BV·Filed 2022·Granted Sep 3, 2024·0 cites·20 claims
- 2664US11036148B2Patterning device cooling system and method of thermally conditioning a patterning deviceASML NETHERLANDS BV·Filed 2019·Granted Jun 15, 2021·0 cites·21 claims
- 2761US10642166B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2019·Granted May 5, 2020·0 cites·20 claims
- 2857US11442366B2Device manufacturing methodsASML NETHERLANDS BV·Filed 2018·Granted Sep 13, 2022·0 cites·20 claims
- 2954US12045555B2Method to label substrates based on process parametersASML NETHERLANDS BV·Filed 2019·Granted Jul 23, 2024·0 cites·21 claims
- 3051US11099485B2Maintaining a set of process fingerprintsASML NETHERLANDS BV·Filed 2018·Granted Aug 24, 2021·0 cites·20 claims
- 3149US11181829B2Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2018·Granted Nov 23, 2021·0 cites·20 claims
- 3248US11036146B2Method and apparatus to reduce effects of nonlinear behaviorASML NETHERLANDS BV·Filed 2016·Granted Jun 15, 2021·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →